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Measurement of the dynamic deformation of a high-frequency scanning mirror using a Shack-Hartmann wavefront sensor

Author(s):
Brown,M.K. ( Microvision, Inc. )
Gong,T.J.
Neal,D.R.
Roller,J.P.
Luanava,S.
Urey,H.
1 more
Publication title:
Optical manufacturing and testing IV : 31 July-2 August 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4451
Pub. Year:
2001
Page(from):
480
Page(to):
488
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441652 [0819441651]
Language:
English
Call no.:
P63600/4451
Type:
Conference Proceedings

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