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Manufacturing-induced residual stresses in optical glasses and crystals: Example of residual stress relief by magnetorheological finishing (MRF) in commercial silicon wafers

Author(s):
Publication title:
Optical manufacturing and testing IV : 31 July-2 August 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4451
Pub. Year:
2001
Page(from):
181
Page(to):
190
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441652 [0819441651]
Language:
English
Call no.:
P63600/4451
Type:
Conference Proceedings

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