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Absolute extreme-ultraviolet metrology

Author(s):
Publication title:
Harnessing light : science and metrology at NIST, 1 August 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4450
Pub. Year:
2001
Page(from):
94
Page(to):
107
Pages:
14
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441645 [0819441643]
Language:
English
Call no.:
P63600/4450
Type:
Conference Proceedings

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