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Quality assurance of HARMS and MOEMS surface structures using confocal white light microscopy

Author(s):
Publication title:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4440
Pub. Year:
2001
Page(from):
51
Page(to):
58
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441546 [0819441546]
Language:
English
Call no.:
P63600/4440
Type:
Conference Proceedings

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