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Synthesis of pure C40 TiSi2 for Si wafer fabrication

Author(s):
Chen,S.Y. ( National Univ. of Singapore )
Shen,Z.X.
Xu,S.Y.
See,A.K.
Chan,L.H.
Li,W.S.
1 more
Publication title:
Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4426
Pub. Year:
2001
Page(from):
272
Page(to):
275
Pages:
4
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441379 [0819441376]
Language:
English
Call no.:
P63600/4426
Type:
Conference Proceedings

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