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Six-beam high-power KrF excimer laser system with energy of 100 J/23 ns

Author(s):
Shan,Y. ( China Institute of Atomic Energy )
Wang,N.
Ma,W.
Yang,D.
Wang,X.
Ma,J.
Jang,X.
Gong,K.
Gao,H.
Tang,X.
Tao,Y.
6 more
Publication title:
ECLIM 2000 : 26th European Conference on Laser Interaction with Matter, 12-16 June, 2000, Prague, Czech Republic
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4424
Pub. Year:
2000
Page(from):
104
Page(to):
107
Pages:
4
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441317 [0819441317]
Language:
English
Call no.:
P63600/4424
Type:
Conference Proceedings

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