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"Dynamics of 3D representation of interfaces in UV-induced chemical vapor deposition: experiments, modeling, and simulation for silicon nitride thin layers"

Author(s):
Flicstein,J. ( France Telecom CNET )
Guillonneau,E.
Marquez,J.
Chun,L.S.How Kee
Maisonneuve,D.
David,C.
Wang,Zh.Zh.
Palmier,J.f.
Courant,J.L.
4 more
Publication title:
Nonresonant laser-matter interaction (NLMI-10) : 21-23 August 2000, St. Petersburg-Pushkin, Russia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4423
Pub. Year:
2000
Page(from):
28
Page(to):
35
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441300 [0819441309]
Language:
English
Call no.:
P63600/4423
Type:
Conference Proceedings

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