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Shape-free coupling-hole-type CO2 laser with arbitrary beam pattern: application feasibility to micromachinery

Author(s):
Publication title:
Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4416
Pub. Year:
2001
Page(from):
474
Page(to):
477
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441218 [081944121X]
Language:
English
Call no.:
P63600/4416
Type:
Conference Proceedings

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