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Self-aligned microtool and electrochemical discharge machining (ECDM) for ceramic materials

Author(s):
Publication title:
Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4416
Pub. Year:
2001
Page(from):
348
Page(to):
353
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441218 [081944121X]
Language:
English
Call no.:
P63600/4416
Type:
Conference Proceedings

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