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Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)

Author(s):
Kim,D. ( Korea Advanced Institute of Science and Technology )
You,J.W.
Kim,S.H.
Kong,H.J.
Lee,Y.W.
Chegal,W.
Kwak,Y.K.
2 more
Publication title:
Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4416
Pub. date:
2001
Vol.:
4416
Page(from):
202
Page(to):
206
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441218 [081944121X]
Language:
English
Call no.:
P63600/4416
Type:
Conference Proceedings

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