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Fabrication and etching processes of silicon-based PZT thin films

Author(s):
Zhao,H. ( Tsinghua Univ. )
Liu,Y.
Liu,J.
Ren,T.
Liu,L.
Li,Z.
1 more
Publication title:
International Conference on Sensor Technology (ISTC 2001)
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4414
Pub. Year:
2001
Page(from):
351
Page(to):
354
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441195 [0819441198]
Language:
English
Call no.:
P63600/4414
Type:
Conference Proceedings

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