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Development of a CMOS-compatible process for a silicon miniature microphone with high sensitivity

Author(s):
Publication title:
International Conference on Sensor Technology (ISTC 2001)
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4414
Pub. Year:
2001
Page(from):
276
Page(to):
279
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441195 [0819441198]
Language:
English
Call no.:
P63600/4414
Type:
Conference Proceedings

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