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Surface micromachined miniature RF switch

Author(s):
Guo,F. ( East China Normal Univ. )
Lai,Z.
Zhu,Z.
Fan,Z.
Long,Y.
Yang,G.
Ge,X.
Chen,S.
Xie,J.
4 more
Publication title:
International Conference on Sensor Technology (ISTC 2001)
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4414
Pub. date:
2001
Vol.:
4414
Page(from):
239
Page(to):
241
Pages:
3
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441195 [0819441198]
Language:
English
Call no.:
P63600/4414
Type:
Conference Proceedings

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