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Effect of stress on defect transformation in hydrogen-implanted silicon and SOI structures

Author(s):
Antonova,J.V. ( Institute of Semiconductor Physics )
Popov,V.P.
Bak-Misiuk,J.
Domagala,J.
Misiuk,A.
Obodnikov,V.I.
Gutakovskii,A.K.
Romano-Rodriguez,A.
3 more
Publication title:
International Conference on Solid State Crystals 2000: Growth, Characterization, and Applications of Single Crystals
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4412
Pub. date:
2000
Vol.:
4412
Page(from):
120
Page(to):
125
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441157 [0819441155]
Language:
English
Call no.:
P63600/4412
Type:
Conference Proceedings

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