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Multibeam high-resolution UV wavelength reticle inspection

Author(s):
Hung,C.C. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Yoo,C.S.
Lin,C.H.
Volk,W.W.
Wiley,J.N.
Khanna,S.
Biellak,S.
Wang,D.
3 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology VIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4409
Pub. Year:
2001
Page(from):
520
Page(to):
531
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441119 [0819441112]
Language:
English
Call no.:
P63600/4409
Type:
Conference Proceedings

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