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RuMBa: a rule-model OPC for low MEEF 130-nm KrF lithography

Author(s):
Hsu,S. ( ASML MaskTools, Inc. )
Shi,X.
Hsu,M.
Corcoran,N.P.
Chen,J.F.
Desai,S.
Sherrill,M.J.
Tseng,Y.C.
Chang,H.A.
Kao,J.F.
Tseng,A.
Liu,W.J.
Chen,A.
Lin,A.
Kujten,J.P.
Jacobs,E.
Verhappen,A.
12 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology VIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4409
Pub. Year:
2001
Page(from):
172
Page(to):
185
Pages:
14
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441119 [0819441112]
Language:
English
Call no.:
P63600/4409
Type:
Conference Proceedings

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