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ZrSiON as a material for high-transmittance attenuated PSM

Author(s):
Kanayama,K. ( Toppan Printing Co., Ltd. )
Haraguchi,T.
Yamazaki,T.
Ii,T.
Matsuo,T.
Fukuhara,N.
Saga,T.
Hattori,Y.
Ooshima,T.
Otaki,M.
5 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology VIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4409
Pub. Year:
2001
Page(from):
147
Page(to):
154
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441119 [0819441112]
Language:
English
Call no.:
P63600/4409
Type:
Conference Proceedings

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