Blank Cover Image

Microscanner actuated by double PZT thin film

Author(s):
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4408
Pub. Year:
2001
Page(from):
528
Page(to):
534
Pages:
7
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441096 [0819441090]
Language:
English
Call no.:
P63600/4408
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Two-dimensional microscanner actuated by PZT thin film

Lin,W.-M., Schroth,A., Matsumoto,S., Lee,C., Maeda,R.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Preparation of PZT films derived by hybrid processing for MEMS application

Yan, L., Wang, Z.J.M., Kokawa, H., Maeda, R.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers

Tsaur, J.-J., Wang, Z.J., Zhang, L., Ichiki, M., Maeda, R., Suga, T.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings "Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS"

Maeda,R., Wang,Z., Chu,J., Lin,W.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Zhang, L., Ichiki, M., Wang, Z.-J., Maeda, R.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Microfabrication of thick and bulk PZT materials for piezoelectric actuator

Lee, S.H., Maeda, R., Esashi, M.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Characterization and application of jet-printed thin PZT layers for actuation of MEMS

Schroth,A., Ichiki,M., Maeda,R., Akedo,J.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers for MEMS applications

Chima-Okereke, C., Reece, M. J., Bushby, A. J., Whatmore, R. W., Zhang, Q.

Materials Research Society
5 Conference Proceedings Preparation and characterization of sol-gel-derived PZT thin films for microactuators

Wang,Z., Maeda,R., Kikuchi,K.M.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Application of jet-printed PZT layers for actuation of small beams,membranes,and a 2D scanning actuator

Schroth,A., Ichiki,M., Maeda,R., Akedo,J., Matsumoto,S.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Deposition of PZT thin films by pulsed laser ablation for MEMS application

Maeda,R., Kikuchi,K.M., Schroth,A., Umezawa,A., Masumoto,S.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Investigation of PZT//LSCO//Pt//Aerogel Thin Film Composites for Uncooled Pyroelectric IR Detectors

Clem, P. G., Tuttle, B. A., Ruffner, J. A., Brinker, C. J., Schwartz, R. W., Rodriguez, M., Warren, W. L.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12