Blank Cover Image

Electromechanical stability of capacitive transducers

Author(s):
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4408
Pub. Year:
2001
Page(from):
463
Page(to):
468
Pages:
6
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441096 [0819441090]
Language:
English
Call no.:
P63600/4408
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Increasing the dynamic range of a micromechanical moving-plate capacitor

Kyynarainen,J.M., Oja,A.S., Seppa,H.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Capacitive Type Humidity Sensor Based on Porous Silicon

Das,J., Hossain,S.M., Chakraborty,S., Gangopadhyay,U., Saha,H.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Micromechanical silicon precision scale

Oja,A.S., Sillanpaa,T., Seppa,H., Kiihamaki,J., Seppala,P., Karttunen,J., Riski,K.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings Pieezoresponse, Measurement and Imaging of Electromechanical PZT and PZN-BT Thin Films

Morros, C., Corbett, M.H., Catalan, G., Gregg, J.M., Bowman, R.M.

Materials Research Society
3 Conference Proceedings Measurement of transducer directivity function

Leeman,S., Healey,A.J., Costa,E.T., Nicacio,H., Dantas,R.G., Maia,J.M.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Plasma Processing of Polyester Webs in Capacitively Coupled Low-Radio-Frequency Discharges

J.M. Grace, L.J. Gerenser, H.K. Zhuang, D.R. Freeman, M.J. Heinsler

Society of Vacuum Coaters
4 Conference Proceedings Distributed transducer shading via spatial gradient electrodes

S.E. Burke, J.M. Sullivan

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings Comparison of piezoresistive and capacitive ultrasonic transducers

Neumann, J.J., Greve, D.W., Oppenheim, I.J.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Micromechanical dc-dc converter

Mottonen,M., Oja,A.S.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Evaluation of Parylene as Protection Layer for Capacitive Micromachined Ultrasonic Transducers

E. Jeanne, C. Meynier, J. Terry, M. Roy, L. Haworth

Electrochemical Society
6 Conference Proceedings Apodization of piezoelectric ceramics for ultrasound transducers

Button,V.L.S.N., Costa,E.T., Maia,J.M.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Diffractive limited acoustic field of an apodized ultrasound transducer

Button,V.L.S.N., Costa,E.T., Maia,J.M., Dantas,R.G.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12