Blank Cover Image

"Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs"

Author(s):
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4408
Pub. Year:
2001
Page(from):
381
Page(to):
390
Pages:
10
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441096 [0819441090]
Language:
English
Call no.:
P63600/4408
Type:
Conference Proceedings

Similar Items:

Lafontan,X., Dufaza,C., Robert,M., Perez,G., Pressecq,F.

SPIE-The International Society for Optical Engineering

7 Conference Proceedings Microelectronics CAD education in France

Dufaza,C., Robert,M.

SPIE - The International Society for Optical Engineering

Lafontan,X., Pressecq,F., Perez,G., Dufaza,C., Karam,J.-M.

SPIE-The International Society for Optical Engineering

8 Conference Proceedings Parametric yield optimization of MEMS

Delauche, F., Affour, B., Dufaza, C.

SPIE-The International Society for Optical Engineering

Lafontan,X., Dufaza,C., Perez,G., Pressecq,F.

SPIE - The International Society for Optical Engineering

Schmitt, P., Nicot, J., Pressecq, F., Lafontan, X., Oudea, C., Esteve, D.

American Institute of Aeronautics and Astronautics

Pressecq,F., Lafontan,X., Perez,G., Fortea,J.-P.

SPIE-The International Society for Optical Engineering

Pressecq, F., Schmitt, P., Veyrie, D., Duong, Q., Lafontan, X., Lellouchi, D.

American Institute of Aeronautics and Astronautics

Lafontan, X., Le Touze, C., Wenk, B., Kolesnik, I., Pressecq, F., Perez, G., Nicot, J.-M., Dardalhon, M., Rigo, S.

SPIE-The International Society for Optical Engineering

Dyck, C.W., Plut, T.A., Nordquist, C.D., Finnegan, P.S., Austin, F., Reines, I.C., Goldsmith, C.

SPIE - The International Society of Optical Engineering

Schmitt, P., Pressecq, F., Perez, G., Lafontan, X., Nicot, J.M., Esteve, D., Fourniols, J.Y., Camon, H., Oudea, C.

SPIE - The International Society of Optical Engineering

Naveed Ansari, K. M. Hurst, C. B. Roberts, W. R. Ashurst

American Institute of Chemical Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12