"Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs"
- Author(s):
- Lafontan,X. ( Lab. D'Informatique, de Robotique et de Microelectronique de Montpellier )
- Dufaza,C.
- Robert,M.
- Pressecq,F.
- Perez,G.
- Publication title:
- Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4408
- Pub. Year:
- 2001
- Page(from):
- 381
- Page(to):
- 390
- Pages:
- 10
- Pub. info.:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441096 [0819441090]
- Language:
- English
- Call no.:
- P63600/4408
- Type:
- Conference Proceedings
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