Design and performance of a polysilicon surface-micromachined microengine realized with arrays of asymmetrical electrothermal microactuators

Design and performance of a polysilicon surface-micromachined microengine realized with arrays of asymmetrical electrothermal microactuators

Author(s):

Kolesar,E.S. ( Texas Christian Univ. )

Publication title:

MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4407

Pub. Year:

2001

Page(from):

310

Page(to):

321

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441089 [0819441082]

Language:

English

Call no.:

P63600/4407

Type:

Conference Proceedings

Details

TDL ID:	ZA00012123
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing Technologies : MEMS Design, Fabrication, Characterization, and Packaging
Conf. info. (Number):	2001
Conf. info. (Venue):	Edinburgh, UK
Conf. info. (Date):	2001.05.30-2001.06.01

Similar Items:

1 Conference Proceedings Design and Performance of a Microengine Realized With Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators Kolesar, Edward S., Ruff, Matthew D., Odom, William E., Jayachandran, Joseph A., McAllister, Justin B., Ko, Simon Y., … Materials Research Society	7 Technical Paper Surface Micromachined Structures with Continuous Hinges and Microrivets for Assembling Three-Dimensional MEMS Devices Kolesar, E., Ruff, M., Odom, W., Wilks, R., Allen, P., Wilken, J., Jayachandran, A., McAllister, J., Howard, J., Ko, S., … American Institute of Aeronautics and Astronautics
2 Conference Proceedings Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators Allen,P.B., Boydston,N.C., Howard,J.T., Ko,S.Y., Kolesar,E.S., Ruff,M.D., Wilken,J.M., Wilks,R.J. SPIE-The International Society for Optical Engineering	8 Technical Paper Surface Micromachined Structures with Continuous Hinges and Microrivets for Assembling Three-Dimensional MEMS Devices. Kolesar, E.S., Ruff, M.D., Odom, W.E., Ko, S.Y., Howard, J.T. Society of Manufacturing Engineers
3 Conference Proceedings Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections Kolesar, Edward S., Allen, Peter B., Boydston, Noah C., Howard, Jeffery T., Ko, Simon Y., Ruff, Matthew D., Wilken, Josh … Materials Research Society	9 Conference Proceedings Optical binary switch and amplitude modulator micromirror arrays Kolesar,E.S., Allen,P.B., Boydston,N.C., Howard,J.T., Ko,S.Y., Wilken,J.M. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Use of Continuous Hinges and Microrivets to Facilitate the Assembly of Three-Dimensional Polysilicon Microelectromechanical Systems (MEMS) Structures Kolesar, E.S., Ruff, M.D., Odom, W.E., Ko, S.Y., Howard, I.T., Allen, P.B., Wilks, R.J., Wilken, J.M., Bosch, J.E., … Electrochemical Society	10 Conference Proceedings Torsional micromirror array design for optical binary switching and amplitude modulation applications Kolesar, E. S., Allen, P. B., Boydston, N. C., Howard, J. T., Ko, S. Y., Wilken, J. W. MRS-Materials Research Society
5 Conference Proceedings Bi-Directional Motion Achieved With a Surface Micromachined Electrothermal MEMS Microengine Kolesar, Edward, Jayachandran, Alfred, Odom, William, Ruff, Matthew, McAllister, Justin, Ko, Simon, Howard, Jeffrey, … Materials Research Society	11 Conference Proceedings Failure analysis of tungsten-coated polysilicon micromachined microengines Walraven,J.A., Mani,S.S., Fleming,J.G., Headley,T.J., Kotula,P.G., Pimentel,A.A., Rye,M.J., Tanner,D.M., Smith,N.F. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures Kolesar, Edward S., Ruff, Matthew D., Odom, William E., Ko, Simon Y., Howard, Jeffery T., Allen, Peter B., Wilks, … Materials Research Society	12 Conference Proceedings Friction in surface-micromachined microengines Miller,S.L., Sniegowski,J.J., LaVigne,G., McWhorter,P.J. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12