Fabrication of microshutter arrays for space application
- Author(s):
Li,M.J. ( NASA Goodard Space Flight Ctr. ) Aslam,I.S. Ewin,A.J. Fettig,R.K. Franz,D.E. Kotecki,C.A. Kutyrev,A.S. Moseley,S.H. Monroy,C. Mott,D.B. Zheng,Y. - Publication title:
- MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4407
- Pub. Year:
- 2001
- Page(from):
- 295
- Page(to):
- 303
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441089 [0819441082]
- Language:
- English
- Call no.:
- P63600/4407
- Type:
- Conference Proceedings
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