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Enhancing the development rate model in optical lithography simulation of ultrathick resist films for applications such as MEMS and LIGA

Author(s):
Publication title:
Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4404
Pub. Year:
2001
Page(from):
209
Page(to):
220
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441058 [0819441058]
Language:
English
Call no.:
P63600/4404
Type:
Conference Proceedings

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