Application of digital holographic microscopy for inspection of micro-optical components
- Author(s):
- Kebbel,V. ( Bremer Institut fur Angewandte Strahltechnik )
- Hartmann,H.-J.
- Juptner,W.P.O.
- Publication title:
- Optical measurement systems for industrial inspection II : application in industrial design : 18-19 June 2001 Munch, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4398
- Pub. Year:
- 2001
- Page(from):
- 189
- Page(to):
- 198
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440938 [0819440930]
- Language:
- English
- Call no.:
- P63600/4398
- Type:
- Conference Proceedings
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