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Enhanced amorphous silicon technology for 320×240 microbolometer arrays with a pitch of 35μm

Author(s):
Mottin,E. ( CEA-LETI )
Martin,J.-L.
Ouvrier-Buffet,J.-L.
Vilain,M.
Bain,A.
Yon,J.-J.
Tissot,J.L.
Chatard,J.P.
3 more
Publication title:
Infrared technology and applications XXVII : 16-20 April 2001, Orlando, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4369
Pub. Year:
2001
Page(from):
250
Page(to):
256
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440648 [0819440647]
Language:
English
Call no.:
P63600/4369
Type:
Conference Proceedings

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