3D finite element modeling of the micromachined microphone with corrugated diaphragm
- Author(s):
Borovkov,A.I. ( St. Petersburg State Technical Univ. ) Pyatishev,E.N. Lurie,M.S. Korshunov,A.V. Akulshin,Y.D. Sabadash,V.O. Smolnikov,B.A. - Publication title:
- Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4348
- Pub. Year:
- 2000
- Page(from):
- 355
- Page(to):
- 360
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440372 [081944037X]
- Language:
- English
- Call no.:
- P63600/4348
- Type:
- Conference Proceedings
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