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3D finite element modeling of the micromachined microphone with corrugated diaphragm

Author(s):
Borovkov,A.I. ( St. Petersburg State Technical Univ. )
Pyatishev,E.N.
Lurie,M.S.
Korshunov,A.V.
Akulshin,Y.D.
Sabadash,V.O.
Smolnikov,B.A.
2 more
Publication title:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4348
Pub. Year:
2000
Page(from):
355
Page(to):
360
Pages:
6
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440372 [081944037X]
Language:
English
Call no.:
P63600/4348
Type:
Conference Proceedings

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