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3D finite element modeling of micromachined pressure sensor

Author(s):
Publication title:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4348
Pub. Year:
2000
Page(from):
338
Page(to):
347
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440372 [081944037X]
Language:
English
Call no.:
P63600/4348
Type:
Conference Proceedings

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