Al+ and N+ implantation in silicon carbide: a role of point defect clusters in defect evolution

Al+ and N+ implantation in silicon carbide: a role of point defect clusters in defect evolution

Author(s):

Rybin,P.V. ( St. Petersburg State Technical Univ. )
Kulikov,D.V.
Trushin,Yu.V.
Petzoldt,J.

Publication title:

Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4348

Pub. Year:

2000

Page(from):

257

Page(to):

263

Pages:

7

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819440372 [081944037X]

Language:

English

Call no.:

P63600/4348

Type:

Conference Proceedings

Details

TDL ID:	ZA00012064
Series ID:	PA00000029
Conf. info. (Name):	International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Conf. info. (Number):	2000 : 4th
Conf. info. (Venue):	St. Petersburg, Russia
Conf. info. (Date):	2000.06.12-2000.06.17

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