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Ablation of amorphous SiO2 using ArF excimer laser

Author(s):
Awazu,K. ( Electrotechnical Lab. )  
Publication title:
Laser-induced damage in optical materials, 2000 : 32nd Annual Boulder Damage Symposium, proceedings, 16-18, October, 2000, Boulder, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4347
Pub. Year:
2000
Page(from):
169
Page(to):
176
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440365 [0819440361]
Language:
English
Call no.:
P63600/4347
Type:
Conference Proceedings

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