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Optical proximity correction of critical layers in DRAM process of 0.12-μm minimum feature size

Author(s):
Publication title:
Optical Microlithography XIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
Pub. date:
2001
Vol.:
4346
Pt.:
Two of Two Parts
Page(from):
1567
Page(to):
1574
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440327 [0819440329]
Language:
English
Call no.:
P63600/4346
Type:
Conference Proceedings

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