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LAVA web-based remote simulation: enhancements for education and technology innovation

Author(s):
Lee,S.I. ( Univ. of California/Berkeley )
Ng,K.C.
Orimoto,T.
Pittenger,J.
Horie,T.
Adam,K.
Cheng,M.
Croffie,E.H.
Deng,Y.
Gennari,F.
Pistor,T.V.
Robins,G.
Williamson,M.
Wu,B.
Yuan,L.
Neureuther,A.R.
11 more
Publication title:
Optical Microlithography XIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
Pub. Year:
2001
Vol.:
4346
Pt.:
Two of Two Parts
Page(from):
1500
Page(to):
1506
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440327 [0819440329]
Language:
English
Call no.:
P63600/4346
Type:
Conference Proceedings

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