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193 lithography and RELACS processing for BEOL lithography

Author(s):
DellaGuardia,R. ( IBM Corp. )
Petrillo,K.E.
Chen,J.
Rabidoux,P.
Dalton,T.J.
Holmes,S.J.
Hadel,L.M.
Malone,K.
Mahorowala,A.P.
Greco,S.
Ferguson,R.A.
6 more
Publication title:
Optical Microlithography XIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
Pub. Year:
2001
Vol.:
4346
Pt.:
Two of Two Parts
Page(from):
1029
Page(to):
1040
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440327 [0819440329]
Language:
English
Call no.:
P63600/4346
Type:
Conference Proceedings

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