Blank Cover Image

Trench pattern lithography for 0.13- and 0.10-μm logic devices at 248- and 193-nm wavelengths

Author(s):
Wang,Y.-Y. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Lin,H.-T.
Yu,S.-S.
Chen,C.-K.
Ku,Y.-C.
Yen,A.
Lin,B.J.
2 more
Publication title:
Optical Microlithography XIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
Pub. Year:
2001
Vol.:
4346
Pt.:
One of Two Parts
Page(from):
276
Page(to):
292
Pages:
17
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440327 [0819440329]
Language:
English
Call no.:
P63600/4346
Type:
Conference Proceedings

Similar Items:

Chen,Y.T., Lin,C.H., Lin,H.T., Hsieh,H.C., Yu,S.S., Yen,A.

SPIE - The International Society for Optical Engineering

Chua, G.S., Lin, Q., Tay, C.J., Quan, C.

SPIE-The International Society for Optical Engineering

Wang,C.-M.A., Lin,S.-J., Lin,C.-H., Ku,Y.-C., Yen,A.

SPIE-The International Society for Optical Engineering

Tan,S.K., Lin,Q., Quan,C., Tay,C.J., See,A.

SPIE-The International Society for Optical Engineering

Shin, J.-J., Wu, T.C., Chen, C.-K., Liu, R.-G., Ku, Y.C., Lin, B.J.

SPIE-The International Society for Optical Engineering

Chen,L.-J., Shiu,L.-H., Tsai,C.-S., Chang,C.-H., Kang,T.-K., Chou,S.-Y.

SPIE-The International Society for Optical Engineering

Wang,C.-M., Lai,C.-W., Huang,J., Liu,H.-Y.

SPIE-The International Society for Optical Engineering

Yune,H.-S., Kim,H.-B., Kim,W.-H., Ahn,C.-N., Ham,Y.-M., Shin,K.-S.

SPIE-The International Society for Optical Engineering

Tan, S.K., Lin, Q., Chua, G.S., Quan, C., Tay, C.J.

SPIE-The International Society for Optical Engineering

Ke, C.-M., Hung, H.-L., Chang, A., Chen, J.-H., Gau, T.-S., Ku, Y.-C., Lin, B.J., Otaka, T., Ueda, K., Kawada, H., …

SPIE - The International Society of Optical Engineering

Chen, L.-J., Ke, C.-M., Yu, S.S., Gau, T.-S., Chen, P., Ku, Y.-C., Lin, B.J., Engelhard, D., Hetzer, D., Yang, J.Y., …

SPIE-The International Society for Optical Engineering

Lin,H.T., Lin,J.C.H., Chiu,C.S.G., Wang,Y.Y., Yen,A.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12