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Development of full-fill bottom bottom antireflective coatings for dual-damascene process

Author(s):
Wang,Y. ( Brewer Science, Inc. )
Wu,X.
Xu,G.
Lamb Ⅲ,J.E.
Sullivan,J.
Claypool,J.B.
Backus,J.
Trautman,S.
Shao,X.
Takei,S.
Sone,Y.
Mizusawa,K.
Fukuro,H.
8 more
Publication title:
Advances in Resist Technology and Processing XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345
Pub. Year:
2001
Vol.:
4345
Pt.:
Two of Two Parts
Page(from):
838
Page(to):
845
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440310 [0819440310]
Language:
English
Call no.:
P63600/4345
Type:
Conference Proceedings

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