"Novel chemically amplified positive resist containing acetal-type crosslinker of poly(3,3'-dimethoxypropene) for 193-nm top surface imaging process"
- Author(s):
Koh,C.-W. ( Hyundai Electronics Industries Co., Ltd. ) Jung,J.-C. Kim,M.-S. Kong,K.-K. Lee,G. Jung,M.-H. Kim,J.-S. Shin,K.-S. - Publication title:
- Advances in Resist Technology and Processing XVIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4345
- Pub. Year:
- 2001
- Vol.:
- 4345
- Pt.:
- Two of Two Parts
- Page(from):
- 798
- Page(to):
- 803
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440310 [0819440310]
- Language:
- English
- Call no.:
- P63600/4345
- Type:
- Conference Proceedings
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