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Resist materials for 157-nm microlithography: an update

Author(s):
Willson,C.G. ( Univ. of Texas at Austin )
Tran,H.V.
Trinque,B.C.
Chiba,T.
Yamada,S.
Sanders,D.P.
Connor,E.F.
Grubbs,R.H.
Klopp,J.M.
Frechet,J.M.J.
Thomas,B.H.
Shafer,G.J.
DesMarteau,D.D.
Conley,W.
9 more
Publication title:
Advances in Resist Technology and Processing XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345
Pub. Year:
2001
Vol.:
4345
Pt.:
One of Two Parts
Page(from):
385
Page(to):
395
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440310 [0819440310]
Language:
English
Call no.:
P63600/4345
Type:
Conference Proceedings

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