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Reference Material 8091: new scanning electron microscope sharpness standard

Author(s):
Vladar,A.E. ( National Institute of Standards and Technology )
Postek,M.T.
Zhang,N.-F.
Larrabee,R.D.
Jones,S.N.
Hajdaj,R.E.
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4344
Pub. Year:
2001
Page(from):
827
Page(to):
834
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440303 [0819440302]
Language:
English
Call no.:
P63600/4344
Type:
Conference Proceedings

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