Blank Cover Image

Impact of optimized illumination upon simple lambda-based design rules for low-K1 lithography

Author(s):
Publication title:
Metrology, Inspection, and Process Control for Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4344
Pub. Year:
2001
Page(from):
797
Page(to):
808
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440303 [0819440302]
Language:
English
Call no.:
P63600/4344
Type:
Conference Proceedings

Similar Items:

Postnikov,S.V., Lucas,K.D., Roman,B.J., Wimmer,K.

SPIE - The International Society for Optical Engineering

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Postnikov, S.V., Lucas, K., Wimmer, K., Ivin, V., Rogov, A.

SPIE-The International Society for Optical Engineering

Roy, S., Van Den Broeke, D.J., Chen, J.F., Liebchen, A., Chen, T., Hsu, S.D., Shi, X., Socha, R.J.

SPIE - The International Society of Optical Engineering

Lucas, K., Postnikov, S.V., Patterson, K., Yuan, C.-M., Thomas, C., Thompson, M.A., Carter, R., Litt, L.C., Montgomery, …

SPIE-The International Society for Optical Engineering

Kang, Y.S., Nam, D.-S., Hwang, C., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE-The International Society for Optical Engineering

Postnikov, S.V., Lucas, K., Garza, C.M., Wimmer, K., LaCour, P., Word, J.C.

SPIE-The International Society for Optical Engineering

Himel,M.D., Hutchins,R.E., Colvin,J.C., Poutous,M.K., Kathman,A.D., Fedor,A.S.

SPIE-The International Society for Optical Engineering

Bourov, A., Postnikov, S.V., Lucas, K.

SPIE-The International Society for Optical Engineering

Poutous, M.K., Himel, M.D., Delaney, W.F., Stack, J.D., Kathman, A.D., Fedor, A.S., Hutchins, R.E., Leonard, J.L.

SPIE-The International Society for Optical Engineering

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Hwang, C., Kim, I., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12