Gauge control for sub-170-nm DRAM product features
- Author(s):
- Lafferty,N. ( Rochester Institute of Technology )
- Gould,C.J.
- Littau,M.E.
- Raymond,C.J.
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4344
- Pub. Year:
- 2001
- Page(from):
- 454
- Page(to):
- 461
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440303 [0819440302]
- Language:
- English
- Call no.:
- P63600/4344
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Scatterometer-based scanner fingerprinting technique(ScatterLith) and its applications in image field and ACLV analysis
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Successful application of angular scatterometry to process control in sub-100-nm DRAM device
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Investigation of full-field CD control of sub-100-nm gate features by phase-shift 248-nm lithography
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Applications of angular scatterometry for the measurement of multiply periodic features
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
A method for generating assist-features in full-chip scale and its application to contact layers of sub-70nm DRAM devices
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Dome scatterometry for the measurement of advanced geometry semiconductor devices [6152-54]
SPIE - The International Society of Optical Engineering |