Practical monitor and control of SEM astigmatism in manufacturing
- Author(s):
- Dupuis,S.R. ( IBM Microelectronics )
- Hayes,T.S.
- Archie,C.N.
- Solecky,E.P.
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4344
- Pub. Year:
- 2001
- Page(from):
- 344
- Page(to):
- 354
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440303 [0819440302]
- Language:
- English
- Call no.:
- P63600/4344
- Type:
- Conference Proceedings
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