Blank Cover Image

Lens-heating-induced focus drift of l-line step and scan: correction and control in a manufacturing environment

Author(s):
Ho,G.H. ( ASML )
Cheng,A.T.
Chen,C.-J.
Fang,C.-K.
Li,M.-C.
Chang,I-C.
Chu,P.-T.
Chu,Y.C.
Shu,K.-Y.
Huang,C.-Y.
Yeh,H.-L.
Shiao,H.C.
Lan,H.K.
8 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4344
Pub. Year:
2001
Page(from):
289
Page(to):
296
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440303 [0819440302]
Language:
English
Call no.:
P63600/4344
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Improving image control by correcting the lens-heating focus drift

Cheng,B.-J., Liu,H., Cui,Y., GuoC,J.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Flat-type metal residue-induced metal line bridge

Hsiao,H.C., Chu,P.T., Hsu,V.M., Chen,C.H.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Phase Transformation Behavior of Bi2O3-ZnO-Nb2O5 Ceramics Sintered at Low Temperature

F.T. Shiao, H.C. Ke, Y.C. Lee

Trans Tech Publications
8 Conference Proceedings Fabrication of micromachined focusing mirrors with seamless reflective surface

Hou, M.T.-K., Liao, K.-M., Yeh, H.-Z., Cheng, B.-W., Hong, P.-Y., Chen, R.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Motion-correlated spiral CT scanning of the lung and mediastinal vessels with cone correction

Bruder, H.K., Stierstorfer, K., Flohr, T.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Two high-order polynomial bendable mirrors in the TLS infrared beamline

Chen,S.-J., Kuan,C.K., Perng,S.Y., Wang,D.J., Ho,H.C., Tseng,T.C., Chen,C.-T., Lo,Y.C.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings New focusing lens system and tolerance analysis for near-field recording system

Lee, J.H., Yoon, H.K., Kang, D.K., Gweon, D.G., Lee, S.T.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Finite Element Prediction of Stack-Die Packages under Board Level Drop Test

H.C. Hsu, Y.C. Hsu, C.L. Yeh, Y.S. Lai

Trans Tech Publications
5 Conference Proceedings Advanced lithographic methods for 300-nm contact patterning over severe topography with i-line stepper

Ho,I.C., Cheng,A., Zhu,S.H.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Best process focus and machine focus: adding focus offset to optimize photolithography process for VLSI manufacturing

Lo,Y.-C., Lee,C.-H., Fan,Y.-T., Chang,C.-K.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Confocal microscopy scanned by digital micromirror device with stray light filters

C.-C. Hung, C.C. Lin, K.-M Yeh, Y.-C. Fang, J.-H. Wu

Society of Photo-optical Instrumentation Engineers
12 Conference Proceedings Optical coupling of lens, liquid and resist in immersion lithography: rigorous model and assessment

Cheng, M., Ho, B.C.P., Yamaguchi, R., Yoshioka, K., Yaegashi, H.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12