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Silicon single atom steps as AFM height standards

Author(s):
Dixson,R.G. ( National Institute of Standards and Technology )
Orji,N.G.
Fu,J.
Tsai,V.
Williams,E.D.
Kacker,R.
Vorburger,T.V.
Edwards,H.L.
Cook,D.
West,P.E.
Nyffenegger,R.
6 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4344
Pub. Year:
2001
Page(from):
157
Page(to):
168
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440303 [0819440302]
Language:
English
Call no.:
P63600/4344
Type:
Conference Proceedings

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