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W-CMP alignment using ASML's ATHENA system on an I-line stepper

Author(s):
Prasad,K.J. ( Chartered Semiconductor Manufacturing, Ltd. )
Rajan,D.A.
Tan,Y.K.
Sun,G.P.
Morgan,S.
Phillips,M.
Ng,B.
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4344
Pub. Year:
2001
Page(from):
79
Page(to):
88
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440303 [0819440302]
Language:
English
Call no.:
P63600/4344
Type:
Conference Proceedings

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