Advanced point diffraction interferometer for EUV aspherical mirrors

Advanced point diffraction interferometer for EUV aspherical mirrors

Author(s):

Ota,K. ( Association of Super-Advanced Electronics Technologies )

Publication title:

Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4343

Pub. Year:

2001

Page(from):

543

Page(to):

550

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819440297 [0819440299]

Language:

English

Call no.:

P63600/4343

Type:

Conference Proceedings

Details

TDL ID:	ZA00012059
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging lithographic technologies
Conf. info. (Number):	2001 : 5th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2001.02.27-2001.03.01

Similar Items:

1 Conference Proceedings Aspherical mirror measurement using a point diffraction interferometer Ota, K., Yamamoto, T., Fukuda, Y., Otaki, K., Nishiyama, I., Okazaki, S. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Recent advances of three-aspherical-mirror system for EUVI Kinoshita,H., Watanabe,T., Li,Y., Miyafuji,A., Oshino,T., Sugisaki,K., Murakami,K., Irie,S., Shirayone,S., Okazaki,S. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Fabrication of aspherical mirrors for EUV projection optics set-3 of HiNA Oshino, T., Takahashi, S., Yamamoto, T., Miyoshi, T., Shiraishi, M., Komiya, T., Kandaka, N., Kondo, H., Mashima, K., … SPIE - The International Society of Optical Engineering	8 Conference Proceedings Current status of ASET-HIT EUV phase-shifting point diffraction interferometer Gomel,Y., Sugisaki,K., Zhu,Y., Niibe,M., Watanabe,T., Kinoshita,H. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Fabrication of aspherical mirrors for HiNA (high numerical aperture EUV exposure tool) set-3 projection optics Oshino, T., Yamamoto, T., Miyoshi, T., Shiraishi, M., Komiya, T., Kandaka, N., Kondo, H., Mashima, K., Nomura, K., … SPIE - The International Society of Optical Engineering	9 Conference Proceedings Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer Naulleau,P., Gldberg,K.A., Anderson,E.H., Batson,P.J., Denham,P., Jackson,K.H., Rekawa,S., Bokor,J. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL Otaki, K., Zhu, Y., Ishii, M., Nakayama, S., Murakami, K., Gemma, T. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Experimental evaluation of out-of-plane distortion of electrostatically chucked EUV reticle K. Ota, T. Taguchi, M. Amemiya, Y. Nishiyama, T. Kamono Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Development of illumination optics and projection optics for high-NA EUV exposure tool (HiNA) Oshino, T., Shiraishi, M., Kandaka, N., Sugisaki, K., Kondo, H., Ota, K., Mashima, K., Murakami, K., Oizumi, H., … SPIE-The International Society for Optical Engineering	11 Conference Proceedings Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes Murakami, K., Saito, J., Ota, K., Kondo, H., Ishii, M., Kawakami, J., Oshino, T., Sugisaki, K., Zhu, Y., Hasegawa, M., … SPIE-The International Society for Optical Engineering
6 Conference Proceedings Absolute measurement of a spherical surface using a point diffraction interferometer Otaki,K., Bonneau,F., Ichihara,Y. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, A. Namiki SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12