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Vacuum delay effect of CAR in mask fabrication

Author(s):
Kim,C.-H. ( Samsung Electronics Co., Ltd. )
Jeon,C.-U.
Han,S.-J.
Cho,W.-I.
Choi,S.-W.
Han,W.-S.
Sohn,J.-M.
2 more
Publication title:
Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4343
Pub. date:
2001
Vol.:
4343
Page(from):
285
Page(to):
293
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440297 [0819440299]
Language:
English
Call no.:
P63600/4343
Type:
Conference Proceedings

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