Blank Cover Image

Effects of Packaging Process Steps on the Functionality of MEMS Devices: Investigation of Electrical Interconnection on Lubricated MEMS

Author(s):
Malshe,Ajay P. ( University of Arkansas )
Shingh,Sushila
Hankins,Keith
Young,Jedediah J.
Park,B.S.
Yedave,S.N.
Brown,W.D.
2 more
Publication title:
Proceedings : 2000 International Symposium on Microelectronics, September 20-22, 2000, Hynes Convention Center, Boston, Massachusetts
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4339
Pub. Year:
2000
Page(from):
580
Page(to):
585
Pages:
6
Pub. info.:
Reston, VA: IMAPS
ISSN:
0277786X
ISBN:
9780930815622 [0930815629]
Language:
English
Call no.:
P63600/4339
Type:
Conference Proceedings

Similar Items:

Dhamdhere, Ajit R., Malshe, Ajay P., Yedave, S.N., Schimidt, W.F., Brown, W.D., Morales, John

IMAPS

Krishnamoorthy,Arun, Singh,Sushila, Malshe,Ajay P., Brown,William D., Naseem,Hameed A.

SPIE - The International Society for Optical Engineering

Brown, W.D., Malshe, A.P., Yedave, S.N., Russell, W.C.

Electrochemical Society

YEDAVE SHARAD N., MALSHE AJAY P., BROWN WILLIAM D., RUSSEL WILLIAM C.

Society of Manufacturing Engineers

Young,Jedediah, Malshe,Ajay P., Brown,W.D., Lenihan,Timothy, Albert,Douglas, Ozguz,Volkan

SPIE-The International Society for Optical Engineering

Malshe,Ajay P., Morrison,W.B., Railkar,T.A., Brown,W.D., Lenihan,T.G.

IMAPS

Ajay P. Malshe, J.G. Glezen, H.A. Naseem, W.D. Brown, L.W. Schaper

Society of Photo-optical Instrumentation Engineers

Malshe, A.P., Khanolkar, A.A., Brown, W.D., Yedave, S.N., Nassem, H.A., Haque, S.

Electrochemical Society

Dmytro Demydov, Atanu Adhvaryu, Philip McCluskey, Ajay P. Malshe

American Chemical Society

Malshe,A.P., O'Neal,C.B., Singh,S., Brown,W.D.

SPIE-The International Society for Optical Engineering

Malshe, A.P., Glezen, J.G., Naseem, H.A., Brown, W.D.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12