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Applicability of white light scanning interferometry for high-resolution characterization of surface defects

Author(s):
Publication title:
Nondestructive Evaluation of Materials and Composites V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4336
Pub. date:
2001
Vol.:
4336
Page(from):
135
Page(to):
145
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440228 [0819440221]
Language:
English
Call no.:
P63600/4336
Type:
Conference Proceedings

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