Capacitive micropressure sensors with underneath readout circuit using a standard CMOS process
- Author(s):
- Publication title:
- Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4334
- Pub. Year:
- 2001
- Page(from):
- 336
- Page(to):
- 344
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440204 [0819440205]
- Language:
- English
- Call no.:
- P63600/4334
- Type:
- Conference Proceedings
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