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Laterally movable gate FET (LMGFET) for on-chip integration of MEMS with electronics

Author(s):
Publication title:
Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4334
Pub. Year:
2001
Page(from):
30
Page(to):
37
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440204 [0819440205]
Language:
English
Call no.:
P63600/4334
Type:
Conference Proceedings

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