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Recent progress in MEMS technology development for military applications

Author(s):
Publication title:
Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4334
Pub. date:
2001
Vol.:
4334
Page(from):
1
Page(to):
12
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440204 [0819440205]
Language:
English
Call no.:
P63600/4334
Type:
Conference Proceedings

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